| 摘要 |
PROBLEM TO BE SOLVED: To stably carry a substrate with a suppressed warp of the substrate.SOLUTION: A substrate conveyor device includes: a conveyor belt 331 for carrying a substrate K; a belt drive unit 333 for feeding the conveyor belt; a belt support body 334 disposed on the lower side of the substrate mounting part of the conveyor belt; a substrate retention body 335 disposed on the upper side of the conveyor belt; an elevation unit 350 for raising the belt support body or lowering the substrate retention body to hold the substrate; and a support roller 336 disposed inside a recess 334b on the top face of the belt support body. When conveying the substrate, the elevation unit lowers the belt support body or raises the substrate retention body in such a manner that the support roller protrudes on the top face of the belt support body. |
