发明名称 SEMICONDUCTOR DEVICES WITH THROUGH VIA ELECTRODES, METHODS OF FABRICARING THE SAME, MEMORY CARDS INCLUDING THE SAME, AND ELECTRONIC SYSTEMS INCLUDING THE SAME
摘要 A semiconductor device includes a via electrode penetrating a substrate and a back-side molding layer covering a back-side surface of the substrate. The back-side molding layer contacts a sidewall of a back-side end portion of the via electrode, which is a portion of the via electrode that protrudes from the back-side surface of the substrate.
申请公布号 US2015048519(A1) 申请公布日期 2015.02.19
申请号 US201414180327 申请日期 2014.02.13
申请人 SK HYNIX INC. 发明人 PARK Jin Woo;LEE Sang Gyu
分类号 H01L23/522;H01L23/00;H01L21/768 主分类号 H01L23/522
代理机构 代理人
主权项 1. A semiconductor device comprising: a first substrate; a first via electrode penetrating the first substrate and including a back-side end portion that protrudes from a back-side surface of the first substrate; and a first back-side molding layer covering the back-side surface of the first substrate and surrounding surfaces of a sidewall of the back-side end portion of the first via electrode.
地址 Icheon KR