发明名称 CONTROLLING THE MELT FRONT OF THIN FILM APPLICATIONS
摘要 Systems and methods for bonding include selectively heating an initial location of a sample to melt a bonding layer at an interface between a first layer and a second layer of the sample. The heating is propagated in a direction away from the initial location such that a melt front of the bonding layer is translated across the interface to provide a void free bond between the first layer and the second layer.
申请公布号 US2015048145(A1) 申请公布日期 2015.02.19
申请号 US201314025269 申请日期 2013.09.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 Bedell Stephen W.;Ott John A.
分类号 B23K3/04;B23K37/00;B23K37/06 主分类号 B23K3/04
代理机构 代理人
主权项 1. A system for bonding, comprising: a controller configured to control a plurality of heating elements to selectively heat an initial location of a sample to melt a bonding layer at an interface between a first layer and a second layer of the sample, and propagate the heating in a direction away from the initial location such that a melt front of the bonding layer is translated across the interface to provide a void free bond between the first layer and the second layer.
地址 Armonk NY US