| 摘要 |
<p>A data-driven exception warning technical method for an integrated circuit technology device comprises the following steps: step 1: monitoring an integrated circuit technology device in a controlled state, and giving warning on the integrated circuit technology device according to a monitored exception; step 2: randomly reading a plurality of sample values of device processing technology key monitoring parameters from a history database, calculating a mean and a variance of the sample values, determining a statistical process control limit of parameter values according to the mean and the variance, and building a statistical process control diagram by means of the statistical process control limit; and step 3: continuously collecting real-time data of quality parameters from the integrated circuit technology device, processing the quality parameters collected in real time; monitoring the parameter values in real time by means of the statistical process control diagram after data are processed, performing corresponding processing when an exception occurs; and storing the collected data into the history database by using a system. In a case in which an exception occurs, the method can rapidly determine a factor which is not under control, and provide effective reference for solving the problem.</p> |
