发明名称 トランジスタとこれを含む半導体素子及びそれらの製造方法
摘要 <p>Semiconductor devices including at least one thin film transistor (TFT) and methods of manufacturing the semiconductor devices. The semiconductor device may include an oxide TFT having a self-align top gate structure. The oxide TFT may include a first oxide semiconductor layer having a first source region, a first drain region, and a first channel region between the first source region and the first drain region, and a first gate insulating layer and a first gate electrode, which are sequentially stacked on the first channel region. A bottom gate electrode may be further disposed below the first oxide semiconductor layer, and the first oxide semiconductor layer may have a multi-layer structure.</p>
申请公布号 JP5670028(B2) 申请公布日期 2015.02.18
申请号 JP20090119199 申请日期 2009.05.15
申请人 三星電子株式会社Samsung Electronics Co.,Ltd. 发明人
分类号 H01L29/786;H01L21/336;H01L21/8234;H01L27/08;H01L27/088 主分类号 H01L29/786
代理机构 代理人
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