| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer transfer device in which a wafer can be prevented from being broken by accurately transferring the wafer and a wafer transfer method. <P>SOLUTION: The wafer transfer device includes a wafer chuck part which holds the wafer, a wafer guide part equipped with a guide member to guide the wafer to a predetermined placing position, and a body part which holds the wafer chuck part and a wafer guide part so that the wafer and the guide member held by the wafer chuck part are opposed to each other in the drop direction of the wafer. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
