发明名称 樹脂塗布装置
摘要 <p>The present invention provides a resin coating device, wherein the resin can be properly expanded regardless of the increasing / decreasing of the amount of resin. The resin coating device (1) comprises a pressing surface (634) for being held on a pressing part (604). The pressing part (604) is provided with a pressure sensor (633) for detecting the pressure. The pressure is exerted on the pressing surface (634) when the lower surface of a workpiece of liquid resin (L) approaching a loading bench (602) is expanded. A control part is provided to control the operation of a moving part (606) according to the pressure detected by the pressure sensor (633).</p>
申请公布号 JP5670208(B2) 申请公布日期 2015.02.18
申请号 JP20110005157 申请日期 2011.01.13
申请人 发明人
分类号 B05C11/02;B05C11/00;B05C11/10;B24B41/06;H01L21/304;H01L21/683 主分类号 B05C11/02
代理机构 代理人
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