| 摘要 |
<p>The invention provides a method of manufacturing a film which has excellent transparency and gas breaking feature, co-evaporation evaporation materials for forming the film, a film obtained by the method, a film sheet possessing the film and a laminate. The method of manufacturing the film is characterized in that sublimation evaporation materials formed by first oxides and sublimation evaporation materials formed by second oxides different from the first oxides are used to from an oxide film formed by the first oxides and the second oxides on basic materials by using a vacuum film forming method and a co-evaporation method.</p> |
