发明名称 半導体装置及びその製造方法
摘要 <P>PROBLEM TO BE SOLVED: To supply a highly reliable circuit board at low costs. <P>SOLUTION: For example, a metal mask 100 with openings 101 therebetween covers a substrate 1 so that the portions of the surface of the substrate 1 that include the chip lead-out electrodes 2 are exposed, a metal conductor is formed on an ionized cladding metal by means of ion plating that applies a cladding energy of 0.01 to 250 eV, and thereafter, a wiring layer 21 is formed comprising a metal conductor formed on a portion of the surface of the substrate 1 by means of detaching the metal mask 100. As a result, it is possible to provide a circuit board with high production characteristics and low cost since it is possible to directly form the wiring layer 21 on the substrate without using photo-lithography. Furthermore, the circuit board and the other chips are laminated, and they are connected by a bonding wire. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5670119(B2) 申请公布日期 2015.02.18
申请号 JP20100181466 申请日期 2010.08.13
申请人 发明人
分类号 H01L25/065;H01L25/07;H01L25/18 主分类号 H01L25/065
代理机构 代理人
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