摘要 |
<p>The present invention relates to an integrated-type turbo molecular pump which can prevent dust from invading into a control unit and can effectively cool electronic components through a blowing-in fan. A pump unit comprises a pump pedestal provided with a stator of a motor, and the control unit comprises a box body (a pedestal plate and an outer shell) which us fixed on the bottom of the pump pedestal in a manner of forming a gap region with the pump pedestal provided with the motor rotator. A substrate equipped with the electronic components is fixed on a box body wall part in the opposition direction to the gap region, i.e., the inner circumferential surface of the pedestal plate. Then, cooling air is delivered to the gap region by the fan, such that heat generated by the electronic components effectively emits to outside the box body from the pedestal plate arranged in the opposite direction to the gap region.</p> |