MICRO COIL MANUFACTURING METHOD AND MANUFACTURING DEVICE THEREOF

摘要

A reaction container 20 includes a cylindrical container body 20a, a source gas introduction pipe group 20b-20d and a gas discharge pipe group 20f extended in the opposite directions from both left and right side portions of the container body 20a, and a cylindrical substrate 30 inserted into the container body 20a. Source gases introduced from the source gas introduction pipe group 20b-20d into the container body 20a are thermally decomposed by the reaction with a catalyst carried on the substrate 30 at a predetermined high temperature to grow micro coils from the substrate 30.