发明名称 不揮発性半導体記憶装置及びその製造方法
摘要 <p>According to one embodiment, a nonvolatile semiconductor memory device includes a first stacked structure body, a first semiconductor layer, a first organic film, a first semiconductor-side insulating film, and a first electrode-side insulating film. The first stacked structure body includes a plurality of first electrode films stacked along a first direction and a first inter-electrode insulating film provided between the first electrode films. The first semiconductor layer is opposed to side faces of the first electrode films. The first organic film is provided between the side faces of the first electrode films and the first semiconductor layer and containing an organic compound. The first semiconductor-side insulating film is provided between the first organic film and the first semiconductor layer. The first electrode-side insulating film provided between the first organic film and the side faces of the first electrode films.</p>
申请公布号 JP5670704(B2) 申请公布日期 2015.02.18
申请号 JP20100252381 申请日期 2010.11.10
申请人 发明人
分类号 H01L21/8247;H01L21/336;H01L27/10;H01L27/115;H01L27/28;H01L29/788;H01L29/792;H01L51/05 主分类号 H01L21/8247
代理机构 代理人
主权项
地址