| 摘要 |
A method for manufacturing gas sensors with a metal oxide layer as sensitive layer is described using the steps of providing a substrate and sensitive and/or electrode material and building a sensitive structure and/or an electrode contacting the sensitive structure by contactless dispensing the sensitive and/or electrode material onto the substrate through a capillary, wherein the contactless dispensing step includes an additional focussing step after the sensitive material has exited the capillary by generating an electrical force field or a fluid-dynamic force field at a location between the capillary and the substrate, thus generating structures of a characteristic length in the range of 30 microns to 10 nm. |
