发明名称 セラミックス構造体の製造方法及び熱電変換素子の製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a ceramic structure which can be formed to a desired size, a manufacturing method thereof, a thermoelectric conversion element, and a manufacturing method thereof. <P>SOLUTION: A manufacturing method of a ceramic structure comprises: a step of forming a first opening in a first partial region; a step of forming a first partial structure 6 in the first opening by filling the first opening with ceramic particles in an aerosol deposition method; a step of forming a second opening 7 in a second partial region adjacent to the first partial region; and a step of forming a second partial structure 8 in the second opening by filling the second opening with the ceramic particles in the aerosol deposition method and then forming a ceramic structure 9 having the first partial structure and the second partial structure. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5672079(B2) 申请公布日期 2015.02.18
申请号 JP20110050170 申请日期 2011.03.08
申请人 发明人
分类号 H01L35/34;H01L35/22;H01L35/32 主分类号 H01L35/34
代理机构 代理人
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