| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform inspection promptly and reliably when abnormality occurs in a substrate processing apparatus. <P>SOLUTION: A substrate processing apparatus including a plurality of processing units and display means displaying abnormality occurrence in each processing unit, comprises: storage means storing information that links details of an alarm of an abnormality occurrence with a part necessary for inspection due to the abnormality occurrence, information of a device operated for isolating the inspection target part from another part without abnormality occurrence, an arrangement of the inspection target part and an arrangement of an operation target device in the isolation, and operational procedure of the operation target device in the isolation; abnormality specification means specifying, based on the information stored in the storage means, a device operated for isolating a part necessary for inspection due to an abnormality occurrence and specifying an arrangement of the specified device to output the specified arrangement to the display means; and operational procedure specification means specifying, based on the information stored in the storage means, operational procedures of the device specified by the abnormality specification means to output the specified operational procedure to the display means. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
