Probe cards for probing integrated circuits

摘要

A device includes a probe card, which further includes a chip. The chip includes a semiconductor substrate, a test engine disposed in the chip, wherein the test engine comprises a device formed on the semiconductor substrate, wherein the device is selected from the group consisting essentially of a passive device, an active device, and combinations thereof. A plurality of probe contacts is formed on a surface of the chip and electrically connected to the test engine.

主权项

1. A device comprising:
a probe card comprising:
a chip comprising:
a semiconductor substrate;a test engine disposed in the chip, wherein the test engine comprises a device formed on the semiconductor substrate, wherein the device is selected from the group consisting essentially of a passive device, an active device, and combinations thereof; anda plurality of probe contacts formed on a surface of the chip and electrically connected to the test engine; and an additional chip stacked on the chip, wherein electrical connectors of the additional chip are electrically connected to electrical connectors of the chip.