| 摘要 |
<p>A silicon/graphene molecular nanosensor comprises: a silicon substrate; a silicon nanowire coupled to the silicon substrate; and a graphene layer arranged on an upper portion of the silicon nanowire. A method to manufacture a silicon/graphene molecular nanosensor comprises: a first step of fabricating a silicon nanowire from a silicon substrate using an electrochemical etching method; and a second step of bonding graphene onto the silicon nanowire formed on the silicon substrate. Moreover, a method to identify the type of molecule using a silicon/graphene molecular nanosensor comprises: a step of repeatedly supplying and interrupting a target molecule at a predetermined cycle while applying a voltage to the silicon/graphene molecular nanosensor; and the other step of measuring a trend in resistance change, in terms of time, when the target molecule is repeatedly supplied and interrupted at the predetermined cycle. According to an embodiment of the present invention, a graphene/silicon nanowire molecular sensor can identify restoration to its original resistance at a high rate when the resistance changes at a high rate and gas supply is suspended, and exhibits performance as a molecular sensor to the target molecule through waveform analysis of a specific resistance graph to the target molecule.</p> |
