Illumination system for detecting the defect in a transparent substrate and a detection system including the same

摘要

An illumination device for providing near isotropic illumination, and particularly an illumination system for detecting the defect in a transparent substrate and a detection system including the same are presented. An illumination system includes: an illumination system for detecting the defect in a transparent substrate, including light source receptacle in bar shape; first spot light sources, each emitting a respective first light, the respective first lights being substantially parallel to each other and the first spot light sources being arranged to a first line of spot light sources along the longitudinal direction of the receptacle; and second spot light sources, each emitting a respective second light, the respective second lights being substantially parallel to each other and the second spot light sources being arranged to a second line of spot light sources along the longitudinal direction of the receptacle.

主权项

1. A detection system for detecting the defect in a transparent substrate at a detection region, comprising:
a first illumination system, comprising:
a first set of spot light sources consisting of a plurality of first spot light sources which emit a respective first light, the respective first lights being substantially parallel to each other and converging to a scan line at the detection region, and the first set of spot light sources and the scan line defining a first light plane;a second set of spot light sources consisting of a plurality of second spot light sources which emit a respective second light, the respective second lights being substantially parallel to each other and converging to the scan line, the second set of spot light sources and the scan line defining a second light plane; a second illumination system, comprising:
a third set of spot light sources consisting of a plurality of third spot light sources which emit a respective third light, the respective third lights being substantially parallel to each other and converging to the scan line, and the third set of spot light sources and the scan line defining a third light plane;a fourth set of spot light sources consisting of a plurality of fourth spot light sources which emit a respective fourth light, the respective fourth lights being substantially parallel to each other and converging to the scan line, the fourth set of spot light sources and the scan line defining a fourth light plane; and an imaging unit for receiving the first lights, the second lights, the third lights and the fourth lights converged at the scan line and conducting the imaging based on these lights, wherein each point on the scan line in the range of the detection region is illuminated by all the first through fourth lights, and the projections of the first and the third lights and the second and the fourth lights, which are converged at each point on the scan line, in a plane P passing the scan line and perpendicular to the transparent substrate are located at different sides of a line 1 in the plane P, which passes the point and is perpendicular to the scan line, and the first and the second light planes and the third and the fourth light planes are located at different sides of the plane P, the second and the third light planes are in superposition with the first and the fourth light planes respectively or are closer to the plane P than the first and the fourth light planes respectively.