| 主权项 |
1. A gas distribution apparatus for controlling flow of gas into a process chamber, comprising:
a gas distribution plate having a front side and a back side; delivery channel recessed in the back side of a gas distribution plate, the delivery channel having an inlet end, an outlet end and a length, the delivery channel including a plurality of apertures spaced along the length extending through the gas distribution plate to the front side of the gas distribution plate, each of the plurality of apertures having an independent hole diameter and delivery angle relative to the front side of the gas distribution plate, the plurality of apertures having one or more of variable spacing along the length of the delivery channel, variable hole diameters along the length of the delivery channel and variable delivery angles along the length of the channel; an inlet on the inlet end of the delivery channel, the inlet connectable to a gas source, wherein flow of the gas is controllable by a gas valve in communication with the inlet; and an outlet on the outlet end of the delivery channel, the outlet connectable to a vacuum source, wherein vacuum pressure through the outlet is controllable by an outlet valve to provide a reduced pressure at the outlet; and a controller to regulate the flow of the gas through the delivery channel and into the process chamber by opening and closing the outlet valve during gas delivery and gas purging in the channel to control the flow of gas through the apertures along the length of the channel. |
