| 摘要 |
<p>The present invention relates to a heater block for an evaporation source. The present invention includes a nozzle part through which a heated evaporation material passes, a hot wire which is installed to surround the nozzle part, and a reflection plate which is installed to surround the hot wire. A first insulation block is installed between the nozzle part and the hot wire. A second insulation block is installed between the hot wire and the reflection plate. According to the present invention, an assembly process is easily performed by combination with the nozzle part while the insulation block, the hot wire, and the reflection plate are assembled as one assembly. The position accuracy of the reflection plate is improved in a manufacturing process by forming the outer surface of the reflection plate with a polygonal surface structure and the deformation is minimized after the manufacturing process.</p> |
