发明名称 Heating apparatus for organic solar cell glass
摘要 <p>The present invention relates to a heating apparatus for an organic solar cell substrate. The heating apparatus for the organic solar cell substrate to heat the substrate with a mask attached on one side thereof includes a heating plate which is attached to one side of the substrate and heats the substrate, and a cooling plate which is combined with one side of the heating plate and cools the heating plate. The present invention makes the heating and cooling time of the substrate fast in a deposition process by combining the heating plate with the cooling plate.</p>
申请公布号 KR101493983(B1) 申请公布日期 2015.02.17
申请号 KR20130138566 申请日期 2013.11.14
申请人 发明人
分类号 H01L21/02;H01L51/48 主分类号 H01L21/02
代理机构 代理人
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