发明名称 Position controller, controlling method thereof and the apparatus comprising the same
摘要 Provided are a position controller capable of having a simple structure and accurately controlling a position, a method of controlling a position and an apparatus including the position controller. The position controller includes a moving part configured to process or measure a workpiece, a laser unit disposed on one side of the moving part, and configured to irradiate a laser, a mask on which a laser image is formed corresponding to the irradiate laser, and a position control unit configured to position the moving part based on information of the laser image formed on the mask.
申请公布号 KR20150017613(A) 申请公布日期 2015.02.17
申请号 KR20130093792 申请日期 2013.08.07
申请人 发明人
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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