发明名称 SOLID-STATE IMAGING APPARATUS, AND MANUFACTURING METHOD OF SOLID-STATE IMAGING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus capable of improving light reception sensitivity without thinning a light shielding part, and a manufacturing method of the solid-state imaging apparatus.SOLUTION: A solid-state imaging apparatus is provided. The solid-state imaging apparatus comprises a semiconductor layer and a light shielding part. A plurality of photoelectric conversion elements are arranged in a two-dimensional array shape. The light shielding part is provided within the semiconductor layer and includes a light shielding member of which the interface with the semiconductor layer is covered with an insulation film. Further, the light shielding part includes a light shielding region and an element separation region. The light shielding region is provided closer to a light receiving surface of the photoelectric conversion element inside of the semiconductor layer and shields light incident to the photoelectric conversion element in a specific direction. The element separation region is provided protrusively from the light shielding region to the plurality of photoelectric conversion elements in a depth direction of the semiconductor layer for electro-optically separating the plurality of photoelectric conversion elements.</p>
申请公布号 JP2015032640(A) 申请公布日期 2015.02.16
申请号 JP20130159906 申请日期 2013.07.31
申请人 TOSHIBA CORP 发明人 TANIDA KAZUMA
分类号 H01L27/146;H01L27/14;H04N5/369 主分类号 H01L27/146
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