| 摘要 |
一用于控制一受测试装置(DUT)的温度之热性控制单元(TCU)系包括一配置于其中之密封式蒸发腔室，蒸发腔室系组构有一致冷剂入口及一致冷剂出口；及至少一表面，其用于受测试装置之热性接合并组构以将热量传导至蒸发腔室。系揭露一测试系统及一电脑程式产品。; and at least one surface for thermal engagement of the device under test and configured to conduct heat to the evaporation chamber. A test system and a computer program product are disclosed. |
