发明名称 SENSING MODULE FOR SENSOR AND ANGULAR VELOCITY SENSOR INCLUDING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a sensing module for a sensor, which includes a first mass body connected to correspond to the center of gravity and a second mass body connected to be spaced apart from the center of gravity and can simultaneously sense physical quantities on multiple axes by production of different displacements of the mass bodies, and an angular velocity sensor including the same.SOLUTION: A sensing module 10 for a sensor comprises a mass body part 11 including a first mass body 11a and a second mass body 11b, a frame 12 supporting the first mass body 11a and the second mass body 11b, first flexible parts 13 connecting the first mass body 11a and the second mass body 11b to the frame 12 respectively, and second flexible parts 14 connecting the first mass body 11a and the second mass body 11b to the frame 12 respectively. The second flexible parts 14 are connected to the first mass body 11a so as to correspond to the center of gravity of the first mass body 11a, and the second mass body 11b is connected to the frame 12 by the second flexible parts 14 so as to be eccentric to the center of gravity of the second mass body 11b.
申请公布号 JP2015031689(A) 申请公布日期 2015.02.16
申请号 JP20140151576 申请日期 2014.07.25
申请人 SAMSUNG ELECTRO-MECHANICS CO LTD 发明人 KIM JONG WOON;LEE JUNG WON;SHIN SEUNG JOO;JEUNG WON KYU
分类号 G01C19/56;H01L29/84;H01L41/113 主分类号 G01C19/56
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