| 摘要 |
PROBLEM TO BE SOLVED: To provide a grease with reduced vaporization and dust emission and used for producing a semiconductor device, and a method of producing the same.SOLUTION: A grease is made by allowing a grease-like composition comprising fluorine-based or silicone-based base oil and thickener to be kept at a temperature of 160°C or more and 250°C or less and a pressure of 133.3 Pa or less for 8 hours or longer. Preferably the temperature is equal to 200°C or more. |
