| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for optimizing effective light intensity.SOLUTION: An effective light intensity distribution is optimized by the steps of: (a) providing a light source discharging a light beam 1 of a first intensity distribution 2a in a Z-axis direction; (b) providing a beam formation optical unit 3 and a beam focusing optical unit 4 that are provided in an x-y plane, and generate a second intensity distribution to be used in a target plane, in which the target plane is tilted by an angle alpha with respect to a focal plane 5 to be determined by the beam focusing optical unit; (c) measuring first intensity at a first point P1 of the second intensity distribution to be used, and second intensity at a second point P2 thereof, in which the points P1 and P2 are disposed on a different side of a rear focal plane 5; (d) moving the beam formation optical unit along a y-axis, and causing a difference between the two pieces of intensity to fall within a predetermined limit. |
