TEMPLATE, PROCESSING METHOD OF TEMPLATE, PATTERN FORMING METHOD AND IMPRINTING RESIST

摘要

PROBLEM TO BE SOLVED: To provide an imprinting template capable of preventing generation of residual film.SOLUTION: The imprinting template includes: a board 2 which has a principal plane; and a pattern including concavities and convexities formed on the principal plane. On the convexities, a liquid repellent layer 11 is selectively formed to repel the imprinting liquid resist which has fluidity.