发明名称 Composition for cleaning of semiconductor wafer
摘要 <p>The present invention relates to a composition for washing a semiconductor wafer and, more specifically, a composition for washing a semiconductor wafer, which includes a quaternary ammonium hydroxide; a non-ion surfactant denoted by chemical formula 1; and an organic acid and an inorganic acid or salt thereof and accordingly improves a washing effect, thereby manufacturing a semiconductor device with a high yield and a good element property.</p>
申请公布号 KR20150017153(A) 申请公布日期 2015.02.16
申请号 KR20130093081 申请日期 2013.08.06
申请人 发明人
分类号 C11D1/74;C11D3/00;H01L21/304 主分类号 C11D1/74
代理机构 代理人
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