| 摘要 |
PROBLEM TO BE SOLVED: To obtain a vibrator for enhancing the capability of detecting angular speed and acceleration by vibrating a vibration arm widely and further facilitating polarization.SOLUTION: A vibrator comprises a base part and a first and a second vibration arm. The first vibration arm has a first piezoelectric substance and a second piezoelectric substance disposed on the second vibration arm side relative to the first piezoelectric substance. The second vibration arm has a third piezoelectric substance disposed in the extending direction of the second vibration arm and a fourth piezoelectric substance disposed on the first vibration arm side relative to the third piezoelectric substance. The first to fourth piezoelectric substances are provided with a lower electrode, a piezoelectric film, and an upper electrode. The base part is provided with a first connection electrode in which the lower electrodes provided in the first and third piezoelectric substances are connected, a second connection electrode in which the upper electrodes provided in the first and third piezoelectric substances are connected, a third connection electrode in which the lower electrodes provided in the second and fourth piezoelectric substances are connected, a fourth connection electrode in which the upper electrodes provided in the second and fourth piezoelectric substances are connected. |
