| 摘要 |
<p>The present invention relates to a disk resonator capable of being applied to a biosensor, a gas sensor, a pressure sensor, and a frequency filter. In particular, the disk resonator comprises: a disk equipped with a first electrode in which a bias supply is inputted; an electrode unit fixed by an elastic material; a towing unit having a capacitive gap existing between the disc and the electrode unit and towing the electrode unit through an electrostatic force to minimize the capacitive gap between the disc and the electrode unit; and a limiting unit for limiting the maximal movement of the electrode unit towards the disk. According to the present invention, by means of the towing unit, the capacitive gap formed between the disc and the electrode unit is decreased while the resonator is operated, so that a production gap is large but an operation gap is minimized. Accordingly, signals can be easily detected. Compared to existing techniques, gaps of several hundred nano units can be produced even with a simple structure and low costs.</p> |
