| 摘要 |
<p>Disclosed is a flexible tube for gas floating applied to an apparatus of manufacturing a semiconductor, an LED, an LCD, an OLED, and a solar cell, and an inner surface treat apparatus for the flexible tube. The flexible tube for gas floating applied to an apparatus of manufacturing a semiconductor, an LED, an LCD, an OLED, and a solar cell includes a tube body which is made of a flexible material and is flexible; and a crease part which is a continuous spiral groove in the tube body. According to the flexible tube for gas floating applied to an apparatus of manufacturing a semiconductor, an LED, an LCD, an OLED, and a solar cell, and an inner surface treat apparatus for a flexible tube, the flexible tube for gas floating applied to an apparatus of manufacturing a semiconductor, an LED, an LCD, an OLED, and a solar cell includes a tube body and a crease part of a spiral groove, thereby performing a smooth fluid movement in the flexible tube for gas floating and also facilitating the movement of the inner surface treat apparatus for the flexible tube so that surface treatment such as ultra-planarization high quality surface treatment is easily performed by the inner surface treat apparatus for the flexible tube, and a cleaning solution after the surface treatment is easily exhausted.</p> |
