| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a static pressure gas bearing device that suitably supports a large-size object to be supported contactlessly.SOLUTION: A plurality of housing holes 211 for housing static gas bearings 10 are provided on an upper surface 212 of an upper plate 21 of a static pressure gas bearing device 1, and a static pressure gas bearing 10 is housed in each of the housing holes 211 so that a bearing surface 13 (a surface 111 of a porous metal sintered member 11) of the static pressure gas bearing and a surface 212 of the upper plate 21 are in level with each other. A compressed gas film is formed between the surface 212 of the upper plate 21 and a plate-like object to be supported which is arranged on the surface 212, and consequently the entire surface 212 of the upper plate 21 functions as a bearing surface for supporting the object to be supported contactlessly including the bearing surface 13 of the static pressure gas bearing 10.</p> |
