| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer transfer device in which a cassette can be appropriately placed on a cassette table without being affected by an orientation of the cassette which stores a wafer.SOLUTION: A wafer transfer device 1 has a cassette table 23 on which a cassette 2 is placed and a cassette detection sensor 35. The cassette 2 has a composition in which a holding section 5 is protruded from a cassette body 4 for storing a wafer W for semiconductor manufacturing. The cassette detection sensor 35 is provided for detecting that the cassette 2 is placed on the cassette table 23. The cassette table 23 has a contact avoidance section 34 for avoiding contact with the holding section 5 of the cassette 2 which is placed on the cassette table 23.</p> |
