摘要 |
<p>AN IMAGE SENSOR PIXEL THAT INCLUDES A PHOTOELECTRIC CONVERSION UNIT (102) SUPPORTED BY A SUBSTRATE (106) AND AN INSULATOR (110) ADJACENT TO THE SUBSTRATE. THE PIXEL INCLUDES A CASCADED LIGHT GUIDE (116, 130) THAT IS LOCATED WITHIN AN OPENING OF THE INSULATOR AND EXTENDS ABOVE THE INSULATOR SUCH THAT A PORTION OF THE CASCADED LIGHT GUIDE HAS AN AIR INTERFACE. THE AIR INTERFACE IMPROVES THE INTERNAL REFLECTION OF THE CASCADED LIGHT GUIDE. THE CASCADED LIGHT GUIDE MAY INCLUDE A SELF-ALIGNED COLOR FILTER (114B, 114G) HAVING AIR-GAPS (422) BETWEEN ADJACENT COLOR FILTERS. AIR-GAPS MAY BE SEALED FROM ABOVE BY A TRANSPARENT SEALING FILM (500). THE TRANSPARENT SEALING FILM MAY HAVE A CONCAVE SURFACE (510) OVER THE AIR-GAP (422) TO DIVERGE LIGHT AWAY FROM THE AIR-GAP INTO ADJACENT COLOR FILTERS. THESE CHARACTERISTICS OF THE LIGHT GUIDE ELIMINATE THE NEED FOR A MICROLENS. ADDITIONALLY, AN ANTI-REFLECTION STACK (230) IS INTERPOSED BETWEEN THE SUBSTRATE AND THE LIGHT GUIDE TO REDUCE BACKWARD REFLECTION FROM THE IMAGE SENSOR. TWO PIXELS OF HAVING DIFFERENT COLOR FILTERS MAY HAVE A DIFFERENCE IN THE THICKNESS OF AN ANTI-REFLECTION FILM WITHIN THE ANTI-REFLECTION STACK.</p> |