| 摘要 |
[Problem] To provide a focus adjustment method and a device therefor which are capable of focusing automatically on a feature point of an arbitrary object selected from within an image in which objects of various shapes have been reproduced. [Solution] A focus adjustment method using a work device which comprises: a work table on which a substrate is placed; an image capture device which does not have an autofocus function; an XYZ drive device which moves the work table and the image capture device relative to one another; a storage device which stores images captured by the image capture device; a display device which displays an image display region; an input device with which it is possible to specify an arbitrary position within the image display region; a focus determination device which performs image processing on the plurality of captured images that have been stored by the storage device, and determines a focused image on the basis of the contrast of the captured images; and a control device which controls the operations of the image capture device and the XYZ drive device. The present invention comprises the focus adjustment method and the device therefor, said method having: a first step for acquiring a part captured image in which a part of the substrate has been captured by the image capture device, and displaying the part capture image in the image display region that has a plurality of divided regions; a second step for performing focused image determination on one divided region selected by a user via the input device, said focused image determination being performed by the focus determination device; and a third step for displaying the captured image that has been determined as the focused image, said captured image being displayed in the image display region. |
