| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber.SOLUTION: An installation unit 200 comprises a top ring 230, a clamp ring 250 and a base ring 240 and, upon tightening of the top ring 230 onto the base ring 240, an elastomer band 300 is clamped between the clamp ring 250 and the base ring 240, and a clamping surface is adapted to release the elastomer band on at least one of a lower surface of the clamp ring 250 and/or an upper surface of the base ring 240. A latch and release mechanism having a handle 264 releases and installs the elastomer band 300 into the mounting groove from between the clamp ring 250 and the base ring 240. |
