SIX-DEGREE-OF-FREEDOM ACTIVE VIBRATION ISOLATION APPARATUS

摘要

A six-degree-of-freedom active vibration isolation apparatus comprises a lower platform (1), an upper platform (4), and six support legs (3). The six support legs (3) are separately connected to the upper platform (4) and the lower platform (1) by using fixing blocks (2) to form a Stewart parallel mechanism. Positions of the three fixing blocks (2) on the lower platform (1) form an equilateral triangle, positions of the three fixing blocks (2) on the upper platform (4) also form an equilateral triangle, the six support legs (3) have same structures, and two adjacent support legs (3) are mutually vertical with each other. Each support leg (3) comprises an active executer and an air spring, the active executer and the air spring form a parallel structure, and the air spring is used as a passive vibration isolation part. The apparatus uses a mode of combining active vibration isolation and passive vibration isolation, can realize an ultra-low inherent frequency, and can effectively isolate the vibration with a frequency exceeding the inherent frequency, can realize good attenuation on the six-degree-of-freedom vibration, and can implement the precise positioning of six degrees of freedom.