DRAWING DEVICE, AND MANUFACTURING METHOD OF ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a drawing device advantageous in terms of heat load.SOLUTION: A drawing device performing drawing on a substrate includes a deceleration electrostatic lens that decelerates a charged particle beam emitted from a charged particle source, a dividing unit that has a plurality of openings and divides the charged particle beam decelerated by the deceleration electrostatic lens into a plurality of charged particle beams, and an acceleration electrostatic lens that accelerates the plurality of charged particle beams divided by the dividing part.