发明名称 |
SiCN and SiN Polishing Slurries and Polishing Methods Using The Same |
摘要 |
A method is disclosed for polishing a wafer with a slurry. In the method, the wafer comprises at least one of silicon carbonitride (SiCN) and silicon nitride (SiN), and further comprises one or both of silicon dioxide (SiO2) and poly silicon, and a removal rate of SiCN is greater than a removal rate of poly silicon, and the removal rate of poly silicon is greater than a removal rate of SiO2, and where the slurry comprises up to about 15 wt % of surface-modified colloidal silica particles which have a primary particle size of less than about 35 nm, and the surface-modified colloidal silica particles comprise a plurality of acid moieties or salts thereof. |
申请公布号 |
US2015044872(A1) |
申请公布日期 |
2015.02.12 |
申请号 |
US201414453491 |
申请日期 |
2014.08.06 |
申请人 |
FUJIMI INCORPORATED |
发明人 |
SAEKI Fusayo;KIM Hooi-Sung |
分类号 |
C09G1/02;H01L21/306 |
主分类号 |
C09G1/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method for polishing a wafer, the method comprising: polishing the wafer with a slurry,
wherein the wafer comprises at least one of silicon carbonitride (SiCN) and silicon nitride (SiN), and further comprises one or both of silicon dioxide (SiO2) and poly silicon, wherein a removal rate of SiCN is greater than a removal rate of SiN, the removal rate of SiCN is greater than a removal rate of poly silicon, and the removal rate of poly silicon is greater than a removal rate of SiO2, wherein the slurry comprises up to about 15 wt % of surface-modified colloidal silica particles, wherein the surface-modified colloidal silica particles have an average primary particle size of less than about 35 nm, and the surface-modified colloidal silica particles comprise a plurality of acid moieties or salts of the acid moieties. |
地址 |
Aichi JP |