CHARGED PARTICLE BEAM GENERATING DEVICE, CHARGED PARTICLE BEAM DEVICE, SAMPLE PROCESSING METHOD, AND SAMPLE OBSERVATION METHOD

摘要

The purpose of the present invention is to generate a charged particle helix wave while maintaining intensity of a charged particle beam generated by a charged particle source, and easily control the helicity as well as the positivity and negativity (orientation of the winding of the helix) of the charged particle helix wave. The axis of a dipole magnetic field and the optical axis (2) of the charged particle beam device are made parallel, and a charged particle beam source (11) is disposed on the axis of the dipole or on a line extending from the axis such that the magnetic flux lines (81) emanating from one end of the dipole and a charged particle beam (27) interact. Furthermore, the amount of magnetic flux generated by the one end of the dipole and the polarity thereof are controlled such that the trajectories of the charged particle beam (27) discharged by the charged particle beam source (11) and the magnetic flux generated by the one end of the dipole satisfy a condition suitable for generating a helix wave (21).