| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To produce a multilayer film optical element usable in a wide wavelength band by a simple manufacturing process. <P>SOLUTION: The multilayer film reflecting mirror 10 includes a multilayer film structure 20 on a flat substrate 11, and an upper stacked structure 30 on the multilayer film structure 20. The multilayer film structure 20 includes first high density substance layers 21 and first low density substance layers 22, which are periodically stacked. The upper stacked structure 30 includes a second high density substance layer 31 and a second low density substance layer 32, which are stacked. The first low density substance layer 22 and the second low density substance layer 32 are stacked in the order in which they are directly in contact with each other at an interface between the multilayer film structure 20 and the upper stacked structure 30. Therefore, when the material of the second high density substance layer 31 is the same as that of the first high density substance layer 21, and the material of the second low density substance layer 32 is the same as that of the first low density substance layer 22, a stacked structure including the order of ABAB...ABABBA is formed from a substrate 11 side. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
