| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an infrared sensor whose thermal responsiveness has been improved. <P>SOLUTION: An Infrared sensor 10 includes: a detecting element 1S having a membrane-structured thin film thermistor 3; a reference element 1R having the membrane-structured thin film thermistor 3 and having the same heat capacity as the detecting element 1S; a temperature compensating element 1C having the membrane-structured thin film thermistor 3 and having the same heat capacity as the reference element 1R; and a substrate 2 for mounting the detecting element 1S, the reference element 1R, and the temperature compensating element 1C. The thin film thermistor 3 of the detecting element 1S, the thin film thermistor 3 of the reference element 1R, and the thin film thermistor 3 of the temperature compensating element 1C have the same resistance values and the same resistance temperature coefficients respectively. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
