| 摘要 |
1350214 Propargyl polymer derivatives G A F CORP 30 April 1971 [7 May 1970] 12520/71 Heading C3P [Also in Division G2] A light-sensitive organic solvent-soluble filmforming polymer comprises recurring structural units having the general formula wherein W is chosen from hydrogen, alkyl radicals, aryl radicals, and halogen; X is chosen from -O-, -S-, and where R is chosen from hydrogen, alkyl radicals and aryl radicals; Y is chosen from substituted and unsubstituted propargyl radicals; Z is chosen from hydrogen, alkyl, aryl, and M is chosen from hydrogen, alkali metal ions, ammonium ion, substituted ammonium ions, alkyl and aryl radicals, which has been prepared by reacting the required polymeric anhydride, acid halide or carboxylic acid or ester thereof with the appropriate propargyl alcohol, amine or mercaptan. In the examples the polymers are prepared by treating a copolymer of methyl vinyl ether and maleic anhydride with propargyl alcohol in the presence of N-methyl-morpholine and treating poly (methyl acrylate) with propargyl alcohol in the presence of tetrabutyl titanate. Photoresists are prepared by applying films of the polymers, optionally containing thioxanthen-9-one and xanthen-9-one, on glass plates, exposing to a quartz high pressure mercury lamp and developing with methyl ethyl ketone and 2-methoxy ethyl acetate. |
