Electro-Optic Silicon Modulator With Capacitive Loading In Both Slots Of Coplanar Waveguides

摘要

Embodiments of the present disclosure provide a high-speed silicon modulator without the microwave mode conversion and provide 50-ohm impedance matching to drivers simultaneously. In one aspect, a device may include an input waveguide region, an optic splitter, two optic phase shifters, an optic splitter, and an output waveguide. The device may include two curved waveguides. Either or both of the curved waveguides may have specially doped regions including PN junctions or MOS capacitors. The PN junctions or MOS capacitors may be alternatively connected to both slots of a coplanar waveguide forming the electrodes.

主权项

1. A device, comprising:
an input waveguide region; an optic splitter; first and second optic phase shifters; an optic splitter; and and an output waveguide.