INSPECTION SYSTEM AND INSPECTION IMAGE DATA GENERATION METHOD

摘要

An inspection system includes a TDI sensor that integrates amounts of secondary charged particles or electromagnetic waves along a predetermined direction at every timing at which a transfer clock is inputted and sequentially transfers the amounts of secondary charged particles or electromagnetic waves so integrated, and a deflector which deflects, based on a difference between an actual position and a target position of the inspection target, the secondary charged particles or electromagnetic waves directed towards the TDI sensor in a direction in which the difference is offset. The target position is set into something like a step-and-riser shape in which the target position is kept staying in the same position by a predetermined period of time that is equal to or shorter than a period of time from an input of the transfer clock to an input of the following transfer clock and thereafter rises by a predetermined distance.

主权项

1. An inspection system comprising:
a primary optical system that sheds either of charged particles and electromagnetic waves in the form of a beam; a movable unit that can hold an inspection target to move the inspection target through a position where the beam is shed by the primary optical system, in a predetermined direction; a TDI sensor that integrates amounts of secondary charged particles or electromagnetic waves that are obtained by shedding the beam on to the inspection target while the movable unit is being moved in the predetermined direction, along the predetermined direction by utilizing a time delay integration system at every timing at which a transfer clock is inputted, and sequentially transfers the amounts of secondary charged particles or electromagnetic waves so integrated as an integrated detection amount, at every timing at which a transfer clock is inputted; a position detection unit that detects a position of the movable unit which moves the inspection target; and a deflector which deflects, based on a difference between an actual position of the inspection target detected by the position detection unit and a target position of the inspection target, the secondary charged particles or electromagnetic waves directed towards the TDI sensor, in a direction in which the difference is offset, wherein when expressed by orthogonal coordinates in which the axis of abscissas represents time and the axis of ordinates represents target position, the target position is set into something like a step-and-riser shape in which the target position is kept in the same position by a predetermined period of time that is equal to or shorter than a transfer interval period which is a period from an input of the transfer clock to an input of the following transfer clock and thereafter rises by a predetermined distance.