发明名称 Method for Producing an Optoelectronic Component
摘要 A method for producing an optoelectronic component is provided. A transfer layer, containing InxGa1-xN with 0<x<1, is grown onto a growth substrate. Subsequently, ions are implanted into the transfer layer to form a separation zone, a carrier substrate is applied, and the transfer layer is separated by way of heat treatment. A further transfer layer, containing InyGa1-yN with 0<y≦1 and y>x, is grown onto the previously grown transfer layer, ions are implanted into the further transfer layer to form a separation zone, a further carrier substrate is applied, and the further transfer layer is separated by way of heat treatment. Subsequently, a semiconductor layer sequence, containing an active layer, is grown onto the surface of the further transfer layer facing away from the further carrier substrate.
申请公布号 US2015044798(A1) 申请公布日期 2015.02.12
申请号 US201214344573 申请日期 2012.09.12
申请人 Haerle Ann-Kathrin;Haerle Jakob Johannes;Haerle Johanna Magdalena 发明人 Hertkorn Joachim;Taki Tetsuya;Engl Karl;Baur Johannes;Hahn Berthold;Haerle Volker Klaus
分类号 H01L33/00;H01L33/12;H01L33/06 主分类号 H01L33/00
代理机构 代理人
主权项
地址 US