| 摘要 |
<p>Provided is a compact, space-saving, and resource-saving mass flowmeter or integrated gas panel device including a plurality of measuring lines having, for example, diaphragm pressure sensors. Pressure sensors (PS1, PS2) are alternately disposed on measuring lines (L1 to L4) adjacent to each other along a flow channel direction when the measuring lines (L1 to L4) are viewed from above, and at the same time, overlap with each other when viewed along the flow channel direction shown in the top view.</p> |
