发明名称 PIEZOELECTRIC ACTUATOR SUBSTRATE, LIQUID DISCHARGE HEAD USING THE SAME, AND RECORDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric actuator substrate hard to break, a liquid discharge head using the same, and a recording device.SOLUTION: A piezoelectric actuator substrate 21 includes a piezoelectric ceramic layer 21b and a plurality of pairs of electrodes 34 and 35 arranged so as to sandwich the piezoelectric ceramic layer 21b therebetween. In a plan view, a central region where a plurality of displacement elements 50 each including the piezoelectric ceramic layer 21b and one pair of electrodes 34 and 35 are arranged and a peripheral region where no displacement elements 50 are arranged exist in the piezoelectric actuator substrate 21. The average crystal grain diameter of the piezoelectric ceramic layer 21b in the peripheral region is smaller than that in the central region.
申请公布号 JP2015029006(A) 申请公布日期 2015.02.12
申请号 JP20130157865 申请日期 2013.07.30
申请人 KYOCERA CORP 发明人 HORIUCHI KOSEI
分类号 H01L41/187;B41J2/045;B41J2/055;H01L41/083;H01L41/09;H01L41/273 主分类号 H01L41/187
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