发明名称 回折素子及び回折素子の製造方法及びそれを用いた分光器
摘要 <p>Objects are to obtain a highly accurate diffraction element that may prevent an intensity decrease of a light beam entering a light receiving unit without a decrease in diffraction efficiency and without a problem of flare or the like, a manufacturing method for the diffraction element, and a spectrometer using the same. A diffraction element (2) includes a diffraction grating formed on a substrate having a curved surface. In the diffraction element (2), the curved surface (3) has an anamorphic shape formed by pivoting a curved line (I) in a plane about a straight line (II) in the same plane serving as a rotation axis, and gratings (10a) of the diffraction grating (10) exist in cross sections orthogonal to the rotation axis.</p>
申请公布号 JP5669434(B2) 申请公布日期 2015.02.12
申请号 JP20100107105 申请日期 2010.05.07
申请人 发明人
分类号 G02B5/18;G01J3/20;G01N21/27;G01N21/47 主分类号 G02B5/18
代理机构 代理人
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